WEP ECV Surface Profiler

Location: 
ANU Engineering
E-114
Process type: 
Analytical - Electrochemical Capacitance Voltage (ECV) Profiling
Process summary: 

Sequential etch electrochemical capaitance-voltage carrier concentration profiling

Marquee: 
Yes
Operational Status: 
Operational
WEP ECV Surface Profiler
WEP ECV Surface Profiler