WEP CPV21 Electrochemical CV (ECV) dopant depth profiler

Location: 
UNSW SPREE Tyree Energy Technology Building (TETB)
TETB Level 1, Lab 139
Process type: 
Analytical - Electrochemical Capacitance Voltage (ECV) Profiling
Process summary: 

Doping Depth Profile Analysis of semiconductors (active dopants)

Marquee: 
Yes
Operational Status: 
Operational

The WEP CPV21 Electrochemical Capacitance Voltage Profiling (ECV-Profiling) system is a characterisation tool for depth analysis of semidconductor layers. (see http://www.wepcontrol.com/cv-profiler/)