Ultrasonic Systems Inc PV-360 spray coater

UNSW SPREE Solar Industrial Research Foundation (SIRF)
UNSW SIRF Ground Level
Process type: 
Silicon - Coating
Process summary: 

Ultrasonic spray coating of dopant sources (H3PO4)

Operational Status: 
Not installed

The PV-360 is a high-volume, in-line spray doping system for the thin and uniform application of phosphoric and boric acid based dopants to crystalline photovoltaic cells for the in-line thermal diffusion and laser doped selective emitter processes.

Wafer/substrate sizes: 125 mm x 125 mm, 156 mm x 156 mm; Throughput: up to 4,000 wph; Loading: manual/4-lane-inline