Thomas Swan Metal Organic Chemical Vapour (MOCVD) System

Location: 
Bluglass Ltd
Silverwater
Process type: 
Compound Inorganic Solar Cells - Deposition Thin Film
Process summary: 

Metalorganic Chemical Vapour Deposition (MOCVD) - high temperature ammonia based. Substrates 19x2" reactor: TMG, TEG, TMA, TMI, cp2Mg, Silane for GaN, InGaN/GaN MQWs, AlGaN, p-GaN, and n-GaN layers

Marquee: 
Yes
Operational Status: 
Operational
Thomas Swan Metal Organic Chemical Vapour (MOCVD) System
Thomas Swan Metal Organic Chemical Vapour (MOCVD) System