Thermco - GP anneal furnace

Location: 
ANFF-NSW Node
Lab 1
Process type: 
Non Material Specific - Thermal Treatment
Process summary: 

High temperature annealing. Most materials, new materials require prior approval. Multiple (up to 20) wafers up to 50mm diameter. 215-1100C. Gases- O2, N2, forming gas (95pc N2, 5pc H2)

Marquee: 
Yes
Operational Status: 
Operational

See ANFF-NSW Website for Further Information