Tempress Quartz Tube Furnace - 6 inch, horizontal 4 stack

Location: 
ANU Engineering
E-114
Process type: 
Silicon - Thermal Treatment
Process summary: 

6 inch, horizontal 4 stack, autoload, 3 tubes equipped - POCl3 / BBr3 / wet oxidation

Marquee: 
Yes
Operational Status: 
Operational

4 independent tubes, 1600 wafers per hour. Pre-installed process recipes up to 140ohm/sq. Integrated cassette - casstte full automation

Tempress Quartz Tube Furnace  - 6 inch, horizontal 4 stack
Tempress Quartz Tube Furnace - 6 inch, horizontal 4 stack