SierraTherm APCVD Conveyor Furnace - AlOx

Location: 
ANU Engineering
E-114
Process type: 
Silicon - Deposition Thin Film
Process summary: 

Atmospheric Pressure chemical vapour conveyor furnace deposition AlOx

Marquee: 
Yes
Operational Status: 
Operational
SierraTherm APCVD Conveyor Furnace  - AlOx
SierraTherm APCVD Conveyor Furnace - AlOx