PlasmaTech V50 Plasma Asher

Location: 
ANFF-SA Node
Uni SA Mawson Lakes
Process type: 
Non Material Specific - Materials Preparation
Process summary: 

Vacuum plasma primarily for ashing photoresist materials from substrates, but can be used for other surface treatments

Marquee: 
Yes
Operational Status: 
Operational
PlasmaTech V50 Plasma Asher
PlasmaTech V50 Plasma Asher