Park System XE-70 AFM

Location: 
Bluglass Ltd
Silverwater
Process type: 
Microscopy - Atomic Force Microscopy (AFM)
Process summary: 

AFM in contact and non-contact modes for surface analysis. The x-y stage has 25x25mm travel, with limited ablility to handle wafers up to 100x100mm

Marquee: 
Yes
Operational Status: 
Operational