Nanometrics Nanospec AFT 180 Film Thickness
Location:
Queensland Microtechnology Facility, Griffith University
Nathan Campus, Qld
Process type:
Analytical - Optical Profilometry (non contact)
Process summary:
Non-contact, spectro-reflectometry (intensity of reflective light as function of incident wavelength) transparent film thickness on substratesreflective in the visible range (eg silicon)
Marquee:
Yes
Operational Status:
Operational