Nanometrics Nanospec AFT 180 Film Thickness

Location: 
Queensland Microtechnology Facility, Griffith University
Nathan Campus, Qld
Process type: 
Analytical - Optical Profilometry (non contact)
Process summary: 

Non-contact, spectro-reflectometry (intensity of reflective light as function of incident wavelength) transparent film thickness on substratesreflective in the visible range (eg silicon)

Marquee: 
Yes
Operational Status: 
Operational