Nanometrics Accent RPM Sigma PL System

Location: 
Bluglass Ltd
Silverwater
Process type: 
Spectroscopy - Photoluminescence Spectroscopy (PL)
Process summary: 

266nm laser for single point analysis (200nm-1200nm) / spectral mapping. White light source for thickness mapping, to 4inch wafers, resolution to 0.1mm.

Marquee: 
Yes
Operational Status: 
Operational