Nanometrics Accent RPM Sigma PL System
Location:
Bluglass Ltd
Silverwater
Process type:
Spectroscopy - Photoluminescence Spectroscopy (PL)
Process summary:
266nm laser for single point analysis (200nm-1200nm) / spectral mapping. White light source for thickness mapping, to 4inch wafers, resolution to 0.1mm.
Marquee:
Yes
Operational Status:
Operational