Lesker thermal evaporator

Location: 
ANFF-NSW Node
Lab 1
Process type: 
Non Material Specific - Deposition Thin Film
Process summary: 

Directional thermal evaporation of a range of metals; Au, AuPd, Cr, Ti, Ni, Al, Ge. Other materials by prior approval; Single wafer up to 75mm diameter; four source positions; rotating stage

Marquee: 
Yes
Operational Status: 
Operational

See ANFF-NSW Website for Further Information