Kurt J Lesker PVD/PVD 75 Deposition System

Location: 
Swinburne University of Technology
AMDC 10
Process type: 
Silicon - Deposition Thin Film
Process summary: 

Physical vapor deposition system

Marquee: 
Yes
Operational Status: 
Not Installed

The Kurt J. Lesker Company PRO Line PVD 75 is the next generation thin film deposition system based on the workhorse PVD 75 platform. With more than 400 units in service worldwide, the PVD 75 is a proven, robust, and versatile design