JA Woollam spectroscopic ellipsometer

Location: 
ANFF-NSW Node
Lab 1
Process type: 
Microscopy - Ellipsometry
Process summary: 

Optical device characterisation, most hard materials, single wafer up to 300mm diameter, 210nm to1000nm (485 wavelengths). WVase software

Marquee: 
Yes
Operational Status: 
Operational

See ANFF-NSW Website for Further Information