HHV/Edwards TF500 Sputter coater

Location: 
ANFF-SA Node
Uni SA Mawson Lakes
Process type: 
Non Material Specific - Deposition Thick Film
Process summary: 

Front-loading deposition system, up to 6 inch diameter substrates, three sputter sources with switch select DC or RF power supplies, multilayer deposition without breaking vacuum.

Marquee: 
Yes
Operational Status: 
Operational
HHV/Edwards TF500 Sputter coater
HHV/Edwards TF500 Sputter coater