DI3000 AFM
Location:
ANFF-NSW Node
Lab 1
Process type:
Microscopy - Atomic Force Microscopy (AFM)
Process summary:
Atomic Force Miscroscopy. most hard materials. single chip or wafer. 20nm imaging capability; max scan area 80um x 80um
Marquee:
Yes
Operational Status:
Operational
See ANFF-NSW Website for Further Information