Dektak profilometers (suite of)
Location:
ANFF-NSW Node
Lab 1
Process type:
Analytical - Profilometry (contact)
Process summary:
Surface profilometry with Dektak 2A, Dektak 3030 and Dektak 150. Most hard materials. Single wafer up to 150mm diameter. catering from 0.1nm to 1mm depth measurement capability
Marquee:
Yes
Operational Status:
Operational
See ANFF-NSW Website for Further Information