Dektak profilometers (suite of)

Location: 
ANFF-NSW Node
Lab 1
Process type: 
Analytical - Profilometry (contact)
Process summary: 

Surface profilometry with Dektak 2A, Dektak 3030 and Dektak 150. Most hard materials. Single wafer up to 150mm diameter. catering from 0.1nm to 1mm depth measurement capability

Marquee: 
Yes
Operational Status: 
Operational

See ANFF-NSW Website for Further Information