BT Imaging QS2 Wafer Inspection - Photoluminescence

Location: 
BT Imaging Pty Ltd
Sydney Australia
Process type: 
Spectroscopy - Photoluminescence Spectroscopy (PL)
Process summary: 

Automated wafer inspection syste, coinstack wafer load, 6 inch wafers, measures up to 3,600 wafers per hour. Parameters - PL images, thickness (single trace wafer centre), resistivity (single trace), lifetime (single trace), plus other PL image extracted data

Marquee: 
Yes
Operational Status: 
Operational
BT Imaging QS2 Wafer Inspection - Photoluminescence
BT Imaging QS2 Wafer Inspection - Photoluminescence