BluGlass Remote Plasma Chemical Vapour Deposition (RPCVD)

Location: 
Bluglass Ltd
Silverwater
Process type: 
Compound Inorganic Solar Cells - Deposition Thin Film
Process summary: 

Remote (Nitrogen) Plasma Chemical Vapour Deposition (RPCVD) - nitride growth at low temperatures (around 700C). Substrate capability 7x 2" wafers

Marquee: 
Yes
Operational Status: 
Operational
BluGlass Remote Plasma Chemical Vapour Deposition (RPCVD)
BluGlass Remote Plasma Chemical Vapour Deposition (RPCVD)