Beamline - X-ray Fluorescence Microscopy
Location:
Australian Synchrotron
Clayton
Process type:
Spectroscopy - Australian Synchrotron Beam Line Spectroscopy
Process summary:
This technique can be used to -
- create elemental maps of constituent with pixel resolutions down to below 1 micron
- can detect elements with atomic number (Z) greater or equal to phosphor (silicon sometimes possible)
- dopants can be detected as deep as 1mm in depth for silicon substrate
- chemical speciation of many elements with Z greater than or equal to Ti can also be mapped.
Marquee:
Yes
Operational Status:
Operational
More details of the beamline available at tool website link. For more assistance please refer to http://www.industry.synchrotron.org.au
