Beamline - X-ray Fluorescence Microscopy

Australian Synchrotron
Process type: 
Spectroscopy - Australian Synchrotron Beam Line Spectroscopy
Process summary: 

This technique can be used to -
- create elemental maps of constituent with pixel resolutions down to below 1 micron
- can detect elements with atomic number (Z) greater or equal to phosphor (silicon sometimes possible)
- dopants can be detected as deep as 1mm in depth for silicon substrate
- chemical speciation of many elements with Z greater than or equal to Ti can also be mapped.

Operational Status: 

More details of the beamline available at tool website link. For more assistance please refer to