AJA Sputter Coater

Location: 
ANU Engineering
E-122
Process type: 
Non Material Specific - Deposition Thin Film
Process summary: 

AJA Sputter Coater - Al, AlOx, aSiH, SiO2, ITO, Ga2O3

Marquee: 
Yes
Operational Status: 
Operational
AJA Sputter Coater
AJA Sputter Coater