Australian PV Research Capability Directory

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Raith 150TWO EBL system

ANFF-NSW Node
FEI Sirion/NPGS EBL system

ANFF-NSW Node
In House - EBL suite of resist processing tools (spinners and hotplates)

ANFF-NSW Node
Karl Suss MA6/BA6 mask aligner

ANFF-NSW Node
Quintel Q6000 mask aligner

ANFF-NSW Node
In House - UVL suite of resist processing tools (spinners and hotplates)

ANFF-NSW Node
STS ICP-RIE system

ANFF-NSW Node
Oxford RIE system

ANFF-NSW Node
In House - Hollow cathode RIE system

ANFF-NSW Node
Denton - O2 plasma ashers

ANFF-NSW Node
Lesker PVD75 e-beam evaporator (general purpose)

ANFF-NSW Node
Lesker PVD75 e-beam evaporator (MOS)

ANFF-NSW Node
Lesker thermal evaporator

ANFF-NSW Node
Edwards thermal evaporator (MOS)

ANFF-NSW Node
HHV sputtering system

ANFF-NSW Node
Edwards sputtering system

ANFF-NSW Node
CNT Savannah S200 ALD system

ANFF-NSW Node
Oxford PECVD tool

ANFF-NSW Node
In House - Hollow cathode PECVD tool

ANFF-NSW Node
Veeco III-V molecular beam epitaxy system

ANFF-NSW Node

Centre Office Contact Details

Australian Centre For Advanced Photovoltaics
UNSW Sydney NSW 2052 Australia
Telephone +61 2 9385 4018 | Email acap@unsw.edu.au

This Program has been supported by the Australian Government through the Australian Renewable Energy Agency (ARENA). The Australian Government through ARENA is supporting Australian research and development in solar photovoltaic and solar thermal technologies as part of its commitment to making renewable energy technologies more affordable and increasing the amount of renewable energy used in Australia. The views expressed herein are not necessarily the views of the Australian Government, and the Australian Government does not accept responsibility for any information or advice contained herein.

Page last updated: Friday 24 June 2016

Australian Centre for Advanced Photovoltaics